Shutdown sts 2004-04-23 01:26:01: "over pressure trip"

vossough at snf.stanford.edu vossough at snf.stanford.edu
Fri Apr 23 01:26:02 PDT 2004


The message ;"over pressure trip" poped again at the begining of the run. Hit "abort" key a couple of times (cycles) in order to open the chamber and retrieve my wafer. 
Also, noticed the chamber needed wiping. While reaching in towipe the inside, the emergency botton was pushed. Turned the system back on again (no problerm here).




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