Problem sts 2004-04-27 17:23:27: No plasma during HF SiO2 dep

jperez at snf.stanford.edu jperez at snf.stanford.edu
Fri Apr 30 08:08:15 PDT 2004


I RAN TWO PASSES OF NITRIDE AND OXIDE AND DIDN'T 
EXPERIENCE A PROBLEM WITH POWER OR PLASMA.




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