Shutdown sts 2004-04-30 08:09:01: GAS bottle change, silane
jperez at snf.stanford.edu
jperez at snf.stanford.edu
Fri Apr 30 08:09:02 PDT 2004
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Problem sts 2004-04-27 17:23:27: No plasma during HF SiO2 dep
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Comment sts 2004-04-30 08:53:14: Silane/N2 cylinder change
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Problem sts 2004-04-27 17:23:27: No plasma during HF SiO2 dep
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Comment sts 2004-04-30 08:53:14: Silane/N2 cylinder change
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