April 2004 Archives by author

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Starting: Tue Apr 6 16:03:55 PDT 2004
Ending: Fri Apr 30 08:53:15 PDT 2004
Messages: 16

• Problem sts 2004-04-27 17:23:27: No plasma during HF SiO2 dep   chion at snf.stanford.edu
• Problem sts 2004-04-25 15:37:39: problem   jhaydon at snf.stanford.edu
• Problem sts 2004-04-06 16:03:54: Down for chamber clean   jperez at snf.stanford.edu
• Problem sts 2004-04-06 16:03:54: Down for chamber clean   jperez at snf.stanford.edu
• Comment sts 2004-04-19 14:42:58: System in Clean cycle   jperez at snf.stanford.edu
• Comment sts 2004-04-19 14:42:58: System in Clean cycle   jperez at snf.stanford.edu
• Problem sts 2004-04-20 00:05:45: wafer inside   jperez at snf.stanford.edu
• Shutdown sts 2004-04-20 00:05:26: Over pressure trip   jperez at snf.stanford.edu
• Shutdown sts 2004-04-23 01:26:01: "over pressure trip"   jperez at snf.stanford.edu
• Problem sts 2004-04-27 17:23:27: No plasma during HF SiO2 dep   jperez at snf.stanford.edu
• Shutdown sts 2004-04-30 08:09:01: GAS bottle change, silane   jperez at snf.stanford.edu
• Problem sts 2004-04-25 15:37:39: problem   mwiemer at snf.stanford.edu
• Comment sts 2004-04-30 08:53:14: Silane/N2 cylinder change   seymour at snf.stanford.edu
• Shutdown sts 2004-04-20 00:05:26: Over pressure trip   vossough at snf.stanford.edu
• Problem sts 2004-04-20 00:05:45: wafer inside   vossough at snf.stanford.edu
• Shutdown sts 2004-04-23 01:26:01: "over pressure trip"   vossough at snf.stanford.edu

Last message date: Fri Apr 30 08:53:15 PDT 2004
Archived on: Fri Jan 11 13:10:20 PST 2013

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