Problem sts SNF 2004-08-17 12:11:51: hf ox problem

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu Aug 19 15:40:45 PDT 2004


Problem isn't repeating each time high freq. is on. No fix at this time. Opened chamber, checked inside, closed chamber and 
ran recipe with high freq. and system behaved itself.




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