Problem sts SNF 2004-12-07 12:06:08: Up for Oxide recipes

jperez at snf.stanford.edu jperez at snf.stanford.edu
Tue Dec 7 12:06:09 PST 2004


Nitride recipe error "gas flow error (2% silane)" . Uniformity 
great, dep. rate fast 84 A/min. You can run nitride, but you'll 
have to stand in front of the machine to clear the errors.




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