From jperez at snf.stanford.edu Wed Feb 4 14:25:51 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 4 Feb 2004 14:25:51 -0800 Subject: Shutdown sts 2004-01-30 10:19:41: Lid dropped, unexpected Message-ID: Bring STS in up status to process four wafers for drytek 4 From jperez at snf.stanford.edu Wed Feb 4 15:07:17 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 4 Feb 2004 15:07:17 -0800 Subject: Shutdown sts 2004-02-04 15:07:17: Jim still looking into why lid dropped Message-ID: Will need o2descum, forgot and had vinyl gloves on From jperez at snf.stanford.edu Wed Feb 11 10:35:38 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 11 Feb 2004 10:35:38 -0800 Subject: Shutdown sts 2004-02-04 15:07:17: Jim still looking into why lid dropped Message-ID: Jim has created a rod guard to be used during operation. This is temporary while waiting for a part to repair the problem E-mail has been sent out on how to use the rod guard. See Jeannie or Jim Haydon. From calarrudo at snf.stanford.edu Sat Feb 14 18:43:17 2004 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Sat, 14 Feb 2004 18:43:17 -0800 Subject: Problem sts 2004-02-14 18:43:17: STS Lid would go up without help from Eric Message-ID: The STS lid would not come up all the way I was able to get my wafers out with Eric's help. I also had a temperature fault pri`oblem during my last deposition/`. The temperature read 343 degrees rather than 350 degrees. From cassell at snf.stanford.edu Mon Feb 16 15:48:42 2004 From: cassell at snf.stanford.edu (cassell at snf.stanford.edu) Date: Mon, 16 Feb 2004 15:48:42 -0800 Subject: Comment sts 2004-02-16 15:48:42: Lid sticks sometimes Message-ID: The new rod guard is a good safety measure. The lid seems to get stuck occassionally. I ran the cleaning protocol, but did not do the nitride predep at the end. Temperature reading was stable around 350 C throughout the cleaning cycle. From crichter at snf.stanford.edu Wed Feb 18 15:11:23 2004 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Wed, 18 Feb 2004 15:11:23 -0800 Subject: Problem sts 2004-02-18 15:11:22: interference fringes seen after etchbak3 run Message-ID: This was the second time that the etchbak3 program was run and the colorful interference fringes on the sts window is still present. From mdickey at snf.stanford.edu Thu Feb 19 12:23:35 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 19 Feb 2004 12:23:35 -0800 Subject: Shutdown sts 2004-02-19 12:23:34: Bottle change Message-ID: Tool is down for gas bottle change for the next 24 hours From mdickey at snf.stanford.edu Fri Feb 20 12:58:41 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 20 Feb 2004 12:58:41 -0800 Subject: Shutdown sts 2004-02-19 12:23:34: Bottle change Message-ID: 2%silane/n2 is back on line From chungchu at snf.stanford.edu Sun Feb 22 21:23:20 2004 From: chungchu at snf.stanford.edu (chungchu at snf.stanford.edu) Date: Sun, 22 Feb 2004 21:23:20 -0800 Subject: Problem sts 2004-02-22 21:23:19: Can't open the lid. Message-ID: No reponse while pushing two blue keys. From jhaydon at snf.stanford.edu Mon Feb 23 09:47:39 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 23 Feb 2004 09:47:39 -0800 Subject: Problem sts 2004-02-22 21:23:19: Can't open the lid. Message-ID: cumuter needed to be reset From jhaydon at snf.stanford.edu Wed Feb 25 07:16:19 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 25 Feb 2004 07:16:19 -0800 Subject: Problem sts 2004-02-14 18:43:17: STS Lid would go up without help from Eric Message-ID: possible cumputer glitch it is working now From jhaydon at snf.stanford.edu Thu Feb 26 08:09:04 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 26 Feb 2004 08:09:04 -0800 Subject: Shutdown sts 2004-02-26 08:09:02: replacing lift cylinder Message-ID: From jhaydon at snf.stanford.edu Thu Feb 26 09:40:18 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 26 Feb 2004 09:40:18 -0800 Subject: Shutdown sts 2004-02-26 08:09:02: replacing lift cylinder Message-ID: replaced lift cylinder From jperez at snf.stanford.edu Thu Feb 26 10:50:16 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 26 Feb 2004 10:50:16 -0800 Subject: Problem sts 2004-02-18 15:11:22: interference fringes seen after etchbak3 run Message-ID: If fringes seem to still show after re-etching with etchbak1 (this is after the etchbak3 has been done and only the viewport seems to be the issue) and platen looks good, continue with the clean process.