From mdickey at snf.stanford.edu Mon Jan 5 11:07:12 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 5 Jan 2004 11:07:12 -0800 Subject: Shutdown sts 2004-01-05 11:07:11: Report Shutdown for sts Message-ID: Checking burnbox temp problem From mdickey at snf.stanford.edu Tue Jan 6 08:57:42 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 6 Jan 2004 08:57:42 -0800 Subject: Shutdown sts 2004-01-05 11:07:11: Report Shutdown for sts Message-ID: Repair faulty burnbox element.......ready for testing at the tool From crichter at snf.stanford.edu Tue Jan 13 11:28:18 2004 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Tue, 13 Jan 2004 11:28:18 -0800 Subject: Problem sts 2004-01-13 11:28:17: lid sometimes does not completely open Message-ID: Lid doesn't open all the way up when loading or unloading wafers. I would have to close the lid and re-open the lid...usually works after that. Also heard squeaking sound (valve turning?) during purging of gases step. Lasts about 20 seconds. From seoung at snf.stanford.edu Tue Jan 13 12:44:09 2004 From: seoung at snf.stanford.edu (seoung at snf.stanford.edu) Date: Tue, 13 Jan 2004 12:44:09 -0800 Subject: Problem sts 2004-01-13 12:44:08: Lid problem Message-ID: Lid doesn't open completely sometimes as mentioned before. From seoung at snf.stanford.edu Tue Jan 13 13:37:51 2004 From: seoung at snf.stanford.edu (seoung at snf.stanford.edu) Date: Tue, 13 Jan 2004 13:37:51 -0800 Subject: Problem sts 2004-01-13 13:37:51: Gas Flow Error(Ammonia) Message-ID: I got an error during the process. My recipe was "sj_nit". So I aborted the process. From jhaydon at snf.stanford.edu Tue Jan 13 14:17:02 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 13 Jan 2004 14:17:02 -0800 Subject: Problem sts 2004-01-13 13:37:51: Gas Flow Error(Ammonia) Message-ID: adjusted regulator should be ok now From jperez at snf.stanford.edu Wed Jan 28 14:30:43 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 28 Jan 2004 14:30:43 -0800 Subject: Problem sts 2004-01-13 12:44:08: Lid problem Message-ID: Ran system and had no problems with lid, except if you use all the compress air at once, you just need to wait a minute and try again. From jperez at snf.stanford.edu Wed Jan 28 14:31:52 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 28 Jan 2004 14:31:52 -0800 Subject: Problem sts 2004-01-13 11:28:17: lid sometimes does not completely open Message-ID: Just wait a minute while the compress air builds back up and try again. From ericp at snf.stanford.edu Fri Jan 30 01:16:43 2004 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Fri, 30 Jan 2004 01:16:43 -0800 Subject: Shutdown sts 2004-01-30 01:16:42: chamber lid comes down unexpectedly Message-ID: System may be safe to run wafers, but I think it should be inspected before the next clean cycle. Don't stick your hands under the lid at all while it's up. From jperez at snf.stanford.edu Fri Jan 30 07:47:55 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 30 Jan 2004 07:47:55 -0800 Subject: Shutdown sts 2004-01-30 01:16:42: chamber lid comes down unexpectedly Message-ID: From jperez at snf.stanford.edu Fri Jan 30 10:19:43 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 30 Jan 2004 10:19:43 -0800 Subject: Shutdown sts 2004-01-30 10:19:41: Lid dropped, unexpected Message-ID: The chamber lid dropped on a user's hand. Jim H. has looked at the system and didn't find anything to cause this problem at this time. But because this is a safety issue we will keep the system down while Jim H. continues working on the problem.