From jperez at snf.stanford.edu Thu Jul 1 07:49:53 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 1 Jul 2004 07:49:53 -0700 Subject: Problem sts SNF 2004-06-29 16:21:05: gas purge is very very slow Message-ID: System up From jperez at snf.stanford.edu Tue Jul 6 09:37:08 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 6 Jul 2004 09:37:08 -0700 Subject: Comment sts SNF 2004-07-06 09:37:08: Clean cycle started 7/2 Message-ID: Thickness 4.6um. Ran etchbak2 after etchbak3. Still wasn't clean From jgantz at snf.stanford.edu Tue Jul 6 17:03:42 2004 From: jgantz at snf.stanford.edu (jgantz at snf.stanford.edu) Date: Tue, 6 Jul 2004 17:03:42 -0700 Subject: Problem sts SNF 2004-07-06 17:03:42: STS non-functioning: purging error Message-ID: After nitride pre-coat following a clean, the machine reported a gas line purging error and is currently in a state that says dangerous gasses may still exist in the chamber, do you want to vent? I am waiting for a qualified technician to assess the situation. From levi at snf.stanford.edu Tue Jul 6 19:07:11 2004 From: levi at snf.stanford.edu (levi at snf.stanford.edu) Date: Tue, 6 Jul 2004 19:07:11 -0700 Subject: Comment sts SNF 2004-07-06 19:07:10: STS PECVD down Message-ID: Hi all, during the Nitride layer predeposition after clean, the former user before me was not able to finish the purge cycle, and the system crashed. I looked at it with Jim McVittie, and he seem to suggest that the Silane line purging is off, and either the preassure is not calibrated in the Silane line, or the pump is not pumping it out while purging. Therefore the system waits till the pressure in the line drops below ~ 15-20 mTorr before purging another cycle again but this may take forever or at least for many minutes for a cycle. I also saw some other problems with N2 gas purging last week. Jim said he will talk to the relevant technician about it in the morning Ofer Levi From jhaydon at snf.stanford.edu Mon Jul 12 13:17:53 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 12 Jul 2004 13:17:53 -0700 Subject: Problem sts SNF 2004-07-06 17:03:42: STS non-functioning: purging error Message-ID: reduced pressure on n2 should work ok now until I can replace the valve From jhaydon at snf.stanford.edu Mon Jul 12 13:18:18 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 12 Jul 2004 13:18:18 -0700 Subject: Comment sts SNF 2004-07-06 19:07:10: STS PECVD down Message-ID: From jhaydon at snf.stanford.edu Mon Jul 12 13:18:30 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 12 Jul 2004 13:18:30 -0700 Subject: Comment sts SNF 2004-07-06 09:37:08: Clean cycle started 7/2 Message-ID: done From jperez at snf.stanford.edu Tue Jul 13 11:59:10 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 13 Jul 2004 11:59:10 -0700 Subject: Shutdown sts SNF 2004-07-13 11:59:10: Silane flow unable to stablize (too high) Message-ID: set point 400 vs actual 500sccm after N2 valve change From jperez at snf.stanford.edu Thu Jul 15 16:24:30 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 15 Jul 2004 16:24:30 -0700 Subject: Shutdown sts SNF 2004-07-13 11:59:10: Silane flow unable to stablize (too high) Message-ID: New rebuilt MFC installed (silane). Good uniformity 1172 A for 3' 20 sec. Dep rate higher than normal 351A/min vs 285 A/min using the low Freq. From jperez at snf.stanford.edu Thu Jul 15 16:27:14 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 15 Jul 2004 16:27:14 -0700 Subject: Problem sts SNF 2004-07-15 16:27:10: Dep. Rate slightly higher from test using lf Message-ID: Low Freq. dep rate is higher after testing 351A/min vs 285A/min From jperez at snf.stanford.edu Mon Jul 26 14:48:48 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 26 Jul 2004 14:48:48 -0700 Subject: Problem sts SNF 2004-07-26 14:48:42: Nitrus Oxide actual flow on the low side Message-ID: The set point for Nitrus Oxide in our recipes are 1400 sccm. The Actual reading in around 1316 sccm. We are getting a error " 2nd RF". From mdickey at snf.stanford.edu Thu Jul 29 13:18:04 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 29 Jul 2004 13:18:04 -0700 Subject: Shutdown sts SNF 2004-07-29 13:18:03: Bottle change Message-ID: `Down for gas bottle change From seymour at snf.stanford.edu Fri Jul 30 13:16:52 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 30 Jul 2004 13:16:52 -0700 Subject: Shutdown sts SNF 2004-07-29 13:18:03: Bottle change Message-ID: cylinder changed and leak check passed. Needs test From jperez at snf.stanford.edu Fri Jul 30 15:18:46 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 30 Jul 2004 15:18:46 -0700 Subject: Problem sts SNF 2004-07-26 14:48:42: Nitrus Oxide actual flow on the low side Message-ID: Pressure for Nitrus Oxide adjusted and actual sccm flow is now stable. From jperez at snf.stanford.edu Fri Jul 30 15:20:31 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 30 Jul 2004 15:20:31 -0700 Subject: Problem sts SNF 2004-07-15 16:27:10: Dep. Rate slightly higher from test using lf Message-ID: Test system after 2% Silane /N2 bottle change and test results good.