From jperez at snf.stanford.edu  Mon Jun  7 08:43:35 2004
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Mon, 7 Jun 2004 08:43:35 -0700
Subject: Problem sts 2004-05-18 13:39:45: RF Power Tolerance Error
Message-ID: <mailman.307.1357938605.25857.sts-pcs@snf.stanford.edu>

Seems to be with only one new recipe.Will redo recipe.



From mdickey at snf.stanford.edu  Tue Jun  8 13:34:40 2004
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Tue, 8 Jun 2004 13:34:40 -0700
Subject: Comment sts 2004-06-08 13:34:39: Bottle chagne
Message-ID: <mailman.308.1357938605.25857.sts-pcs@snf.stanford.edu>

N2O bottle has been changed



From jhaydon at snf.stanford.edu  Tue Jun 22 09:13:42 2004
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Tue, 22 Jun 2004 09:13:42 -0700
Subject: Comment sts 2004-06-08 13:34:39: Bottle chagne
Message-ID: <mailman.309.1357938605.25857.sts-pcs@snf.stanford.edu>

bottle has been chagned



From jperez at snf.stanford.edu  Mon Jun 28 11:44:30 2004
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Mon, 28 Jun 2004 11:44:30 -0700
Subject: Problem sts SNF 2004-06-28 11:44:29: Chamber clean inprocess
Message-ID: <mailman.310.1357938605.25857.sts-pcs@snf.stanford.edu>




From jperez at snf.stanford.edu  Tue Jun 29 08:03:10 2004
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 29 Jun 2004 08:03:10 -0700
Subject: Problem sts SNF 2004-06-28 11:44:29: Chamber clean inprocess
Message-ID: <mailman.311.1357938605.25857.sts-pcs@snf.stanford.edu>

Chamber clean completed.



From kwang at snf.stanford.edu  Tue Jun 29 16:21:06 2004
From: kwang at snf.stanford.edu (kwang at snf.stanford.edu)
Date: Tue, 29 Jun 2004 16:21:06 -0700
Subject: Problem sts SNF 2004-06-29 16:21:05: gas purge is very very slow
Message-ID: <mailman.312.1357938605.25857.sts-pcs@snf.stanford.edu>

it has been already 20 minutes purging after a oxide depo, and not done yet...