From mdickey at snf.stanford.edu  Mon May  3 07:32:56 2004
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Mon, 3 May 2004 07:32:56 -0700
Subject: Comment sts 2004-04-30 08:53:14: Silane/N2 cylinder change
Message-ID: <mailman.304.1357938605.25857.sts-pcs@snf.stanford.edu>

Bottle change is done......passed leak check



From mdickey at snf.stanford.edu  Mon May  3 07:33:09 2004
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Mon, 3 May 2004 07:33:09 -0700
Subject: Shutdown sts 2004-04-30 08:09:01: GAS bottle change, silane
Message-ID: <mailman.305.1357938605.25857.sts-pcs@snf.stanford.edu>

Bottle change is done....back to use



From jperez at snf.stanford.edu  Tue May 18 13:39:46 2004
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 18 May 2004 13:39:46 -0700
Subject: Problem sts 2004-05-18 13:39:45: RF Power Tolerance Error
Message-ID: <mailman.306.1357938605.25857.sts-pcs@snf.stanford.edu>

Low Freq. error first 15 sec. of deposition. Repeated twice with 
same errror.