From levi at snf.stanford.edu Mon Sep 6 15:08:12 2004 From: levi at snf.stanford.edu (levi at snf.stanford.edu) Date: Mon, 6 Sep 2004 15:08:12 -0700 Subject: Problem sts SNF 2004-09-06 15:08:12: computer problem Message-ID: The screen on the STS PECVD seem to be dead. I tried booting the computer as shown in the log book. The computer seem to be booting OK but no sign on screen. Ofer Levi From jhaydon at snf.stanford.edu Tue Sep 7 12:22:23 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 7 Sep 2004 12:22:23 -0700 Subject: Problem sts SNF 2004-09-06 15:08:12: computer problem Message-ID: replaced monitor From mdickey at snf.stanford.edu Thu Sep 9 09:50:33 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 9 Sep 2004 09:50:33 -0700 Subject: Comment sts SNF 2004-09-09 09:50:33: Bottle change Message-ID: At 2:00 a gas bottle change will be done and the tool will down for 24 hours. The tool will also need testing after. From jhaydon at snf.stanford.edu Thu Sep 9 15:53:20 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 9 Sep 2004 15:53:20 -0700 Subject: Shutdown sts SNF 2004-09-09 15:53:20: bottle change will be down for 24 hrs Message-ID: From mdickey at snf.stanford.edu Fri Sep 10 14:00:30 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 10 Sep 2004 14:00:30 -0700 Subject: Comment sts SNF 2004-09-10 14:00:29: Needs test Message-ID: Bottle is back on line. Tool needs testing. From emyers at snf.stanford.edu Fri Sep 10 16:39:11 2004 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 10 Sep 2004 16:39:11 -0700 Subject: Problem sts SNF 2004-09-10 16:39:11: SiH4 Bottle Change, Qual Info Message-ID: STD_1kNIT: 73.2 A/min. RI: 2.051 STD_HFOX: RF Fault, No Deposition STD_LFOX: 269.7 A/min. RI: 1.470 From emyers at snf.stanford.edu Fri Sep 10 16:40:34 2004 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 10 Sep 2004 16:40:34 -0700 Subject: Shutdown sts SNF 2004-09-09 15:53:20: bottle change will be down for 24 hrs Message-ID: From emyers at snf.stanford.edu Fri Sep 10 16:42:11 2004 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 10 Sep 2004 16:42:11 -0700 Subject: Comment sts SNF 2004-09-09 09:50:33: Bottle change Message-ID: Done From emyers at snf.stanford.edu Fri Sep 10 16:42:27 2004 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 10 Sep 2004 16:42:27 -0700 Subject: Comment sts SNF 2004-09-10 14:00:29: Needs test Message-ID: Done From calarrudo at snf.stanford.edu Sun Sep 12 15:08:21 2004 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Sun, 12 Sep 2004 15:08:21 -0700 Subject: Problem sts SNF 2004-09-12 15:08:20: incorrect load and tune readings Message-ID: I ran a dummy pass to verify correct deposition thickness. Both the load and tune readings were incorrect; load .03, tune .04 during deposition of 1200A STS SiO2. load shoud be 24.2, tune 40.7. I made a comment in the STS log. From jperez at snf.stanford.edu Thu Sep 16 11:40:49 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 16 Sep 2004 11:40:49 -0700 Subject: Problem sts SNF 2004-09-16 11:40:45: High Frequancy Message-ID: The High Frequency automatic match tuning isn't working. From altug at snf.stanford.edu Sat Sep 18 20:56:21 2004 From: altug at snf.stanford.edu (altug at snf.stanford.edu) Date: Sat, 18 Sep 2004 20:56:21 -0700 Subject: Problem sts SNF 2004-09-18 20:56:19: Message-ID: plasma does not start. Automatic tuning does not work properly (Reflected power is equal to incident power) From jperez at snf.stanford.edu Mon Sep 20 10:10:18 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 20 Sep 2004 10:10:18 -0700 Subject: Shutdown sts SNF 2004-09-20 10:10:16: Can't proceed with the clean cycle due to HF Message-ID: Reflective power is too high and is faulting. From jhaydon at snf.stanford.edu Wed Sep 22 14:10:55 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 22 Sep 2004 14:10:55 -0700 Subject: Shutdown sts SNF 2004-09-20 10:10:16: Can't proceed with the clean cycle due to HF Message-ID: installed new RF relay is working now From jhaydon at snf.stanford.edu Wed Sep 22 14:11:09 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 22 Sep 2004 14:11:09 -0700 Subject: Problem sts SNF 2004-09-18 20:56:19: Message-ID: From jhaydon at snf.stanford.edu Wed Sep 22 14:11:30 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 22 Sep 2004 14:11:30 -0700 Subject: Problem sts SNF 2004-09-16 11:40:45: High Frequancy Message-ID: installed new RF relay From jhaydon at snf.stanford.edu Wed Sep 22 14:14:04 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 22 Sep 2004 14:14:04 -0700 Subject: Problem sts SNF 2004-09-12 15:08:20: incorrect load and tune readings Message-ID: installed new relay From jhaydon at snf.stanford.edu Wed Sep 22 14:14:39 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 22 Sep 2004 14:14:39 -0700 Subject: Problem sts SNF 2004-09-10 16:39:11: SiH4 Bottle Change, Qual Info Message-ID: From jhaydon at snf.stanford.edu Wed Sep 22 16:39:55 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 22 Sep 2004 16:39:55 -0700 Subject: Shutdown sts SNF 2004-09-22 16:39:54: hf RF still not working Message-ID: From jperez at snf.stanford.edu Thu Sep 23 16:11:17 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 23 Sep 2004 16:11:17 -0700 Subject: Shutdown sts SNF 2004-09-22 16:39:54: hf RF still not working Message-ID: High Frequency reflective power is back down to zero. System now ready for clean From jperez at snf.stanford.edu Thu Sep 23 16:11:46 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 23 Sep 2004 16:11:46 -0700 Subject: Problem sts SNF 2004-09-23 16:11:45: System is in the Clean cycle Message-ID: From emyers at snf.stanford.edu Fri Sep 24 14:27:00 2004 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 24 Sep 2004 14:27:00 -0700 Subject: Problem sts SNF 2004-09-23 16:11:45: System is in the Clean cycle Message-ID: Std_1kNit, Index 2.04 Thickness 1175 Ang. From jperez at snf.stanford.edu Mon Sep 27 10:59:39 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 27 Sep 2004 10:59:39 -0700 Subject: Problem sts SNF 2004-09-27 10:59:28: STS in Clean Cycle Message-ID: From yyao at snf.stanford.edu Mon Sep 27 16:49:15 2004 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Mon, 27 Sep 2004 16:49:15 -0700 Subject: Problem sts SNF 2004-09-27 16:49:13: RF1 power tolerance error Message-ID: It happens multiple times so that process can't continue From yyao at snf.stanford.edu Mon Sep 27 17:09:24 2004 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Mon, 27 Sep 2004 17:09:24 -0700 Subject: Shutdown sts SNF 2004-09-27 17:09:22: process can't continue Message-ID: From jperez at snf.stanford.edu Tue Sep 28 08:42:41 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 28 Sep 2004 08:42:41 -0700 Subject: Problem sts SNF 2004-09-27 10:59:28: STS in Clean Cycle Message-ID: Finished cleaning system From jperez at snf.stanford.edu Tue Sep 28 08:44:05 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 28 Sep 2004 08:44:05 -0700 Subject: Problem sts SNF 2004-09-27 16:49:13: RF1 power tolerance error Message-ID: Ran descum recipe without error, OK to use. From jperez at snf.stanford.edu Tue Sep 28 08:46:13 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 28 Sep 2004 08:46:13 -0700 Subject: Shutdown sts SNF 2004-09-27 17:09:22: process can't continue Message-ID: User stopped processing until someone could look into the problem. OK to use