Problem sts SNF 2004-09-10 16:39:11: SiH4 Bottle Change, Qual Info

emyers at snf.stanford.edu emyers at snf.stanford.edu
Fri Sep 10 16:39:11 PDT 2004

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STD_1kNIT: 73.2 A/min.  RI: 2.051
STD_HFOX:  RF Fault, No Deposition
STD_LFOX:  269.7 A/min.  RI: 1.470

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