Problem sts SNF 2004-09-12 15:08:20: incorrect load and tune readings

calarrudo at snf.stanford.edu calarrudo at snf.stanford.edu
Sun Sep 12 15:08:21 PDT 2004


I ran a dummy pass to verify correct deposition thickness.  Both the load and tune readings were incorrect; load .03, tune .04 during deposition of 1200A STS SiO2.  load shoud be 24.2, 
tune 40.7.  I made a comment in the STS log.




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