From alirezaa at snf.stanford.edu Sun Apr 3 17:50:46 2005 From: alirezaa at snf.stanford.edu (alirezaa at snf.stanford.edu) Date: Sun, 3 Apr 2005 17:50:46 -0700 Subject: Problem sts SNF 2005-04-03 17:50:46: problems Message-ID: The silane flow is even more unstable than before, and the plasma frequently dies in the low-RF cycle of the nitride deposition process. From jperez at snf.stanford.edu Tue Apr 5 10:07:23 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 5 Apr 2005 10:07:23 -0700 Subject: Problem sts SNF 2005-04-05 10:07:22: Thickness exceeded 4.5um, longer clean Message-ID: Will have to do a longer clean (2X) due to thickness exceeding 4.5um (4.9um). From levi at snf.stanford.edu Sun Apr 10 15:40:10 2005 From: levi at snf.stanford.edu (levi at snf.stanford.edu) Date: Sun, 10 Apr 2005 15:40:10 -0700 Subject: Problem sts SNF 2005-04-10 15:40:10: Silane MFC does not stabilize Message-ID: In Nitride recipe, we set the MFC for the Silane to 1900 SCCM. The MFC did not control the flow well, and the flow rate changed from 1650 to 2030. while swinging back and forth. As a result. every few seconds . there will be flow rate error for the Silane flow and the plasma etch will stop, until resumed by F2 key. Seems that the MFC does not function to stabilize flow. This was not observed by former MFC Ofer From jperez at snf.stanford.edu Mon Apr 11 07:43:05 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 11 Apr 2005 07:43:05 -0700 Subject: Problem sts SNF 2005-04-05 10:07:22: Thickness exceeded 4.5um, longer clean Message-ID: Clean cycle completed From jhaydon at snf.stanford.edu Wed Apr 13 15:37:17 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 13 Apr 2005 15:37:17 -0700 Subject: Problem sts SNF 2005-04-10 15:40:10: Silane MFC does not stabilize Message-ID: stability problem fixed. Delivery pressure was set to high From jhaydon at snf.stanford.edu Wed Apr 13 15:37:53 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 13 Apr 2005 15:37:53 -0700 Subject: Problem sts SNF 2005-04-03 17:50:46: problems Message-ID: stability problem fixed From jhaydon at snf.stanford.edu Wed Apr 13 15:39:22 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 13 Apr 2005 15:39:22 -0700 Subject: Problem sts SNF 2005-03-15 22:05:39: Unstable Flow Message-ID: stability problem fixed From jhaydon at snf.stanford.edu Wed Apr 13 15:39:46 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 13 Apr 2005 15:39:46 -0700 Subject: Problem sts SNF 2005-03-13 13:30:05: jumpy silane flow Message-ID: stability problem fixed From seymour at snf.stanford.edu Wed Apr 20 07:30:40 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 20 Apr 2005 07:30:40 -0700 Subject: Shutdown sts SNF 2005-04-20 07:30:40: Silane cylinder change Message-ID: From mdickey at snf.stanford.edu Thu Apr 21 12:57:09 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 21 Apr 2005 12:57:09 -0700 Subject: Shutdown sts SNF 2005-04-20 07:30:40: Silane cylinder change Message-ID: Gas is back on line. System needs a test From mdickey at snf.stanford.edu Thu Apr 21 12:57:30 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 21 Apr 2005 12:57:30 -0700 Subject: Problem sts SNF 2005-04-21 12:57:29: Test Message-ID: System needs a test after bottle change From jperez at snf.stanford.edu Thu Apr 21 15:19:21 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 21 Apr 2005 15:19:21 -0700 Subject: Problem sts SNF 2005-04-21 12:57:29: Test Message-ID: Test completed, 2% silane flow stable at 2000 sccm. Refractive Index good (2.03), dep. rate low due to no seasoning prior to deposition. Read previous users's log entre wrong. Uniformity good! See log book for more details.