Problem sts SNF 2005-04-21 12:57:29: Test

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu Apr 21 15:19:21 PDT 2005


Test completed, 2% silane flow stable at 2000 sccm.
Refractive Index good (2.03), dep. rate low due to no
 seasoning prior to deposition. Read previous users's log entre wrong. Uniformity good! See log book for more details.




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