From jperez at snf.stanford.edu Mon Aug 1 07:40:06 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 1 Aug 2005 07:40:06 -0700 Subject: Comment sts SNF 2005-07-25 14:34:10: did Ox prog everything looks good Message-ID: test completed! From jperez at snf.stanford.edu Mon Aug 1 07:40:21 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 1 Aug 2005 07:40:21 -0700 Subject: Comment sts SNF 2005-07-25 12:29:21: Test needed Message-ID: Done! From jperez at snf.stanford.edu Mon Aug 1 07:40:37 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 1 Aug 2005 07:40:37 -0700 Subject: Comment sts SNF 2005-07-25 06:26:09: Test Message-ID: Done! From jperez at snf.stanford.edu Thu Aug 11 08:57:54 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 11 Aug 2005 08:57:54 -0700 Subject: Problem sts SNF 2005-07-20 11:29:04: purge takes long time Message-ID: Jim haydon duct seal for slow leak and will repair during the week STS PECVD shut down occurs. From jperez at snf.stanford.edu Tue Aug 16 15:13:52 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 16 Aug 2005 15:13:52 -0700 Subject: Shutdown sts SNF 2005-08-16 15:13:51: Ammonia Shut off Message-ID: From rcrane at snf.stanford.edu Tue Aug 16 17:20:01 2005 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Tue, 16 Aug 2005 17:20:01 -0700 Subject: Shutdown sts SNF 2005-08-16 15:13:51: Ammonia Shut off Message-ID: STS dep can still be used for process not requiring NH3 Dick From rcrane at snf.stanford.edu Wed Aug 17 11:42:32 2005 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Wed, 17 Aug 2005 11:42:32 -0700 Subject: Problem sts SNF 2005-08-17 11:42:32: NH3 down for gas tie-in Message-ID: From jperez at snf.stanford.edu Thu Aug 25 09:37:50 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 25 Aug 2005 09:37:50 -0700 Subject: Problem sts SNF 2005-08-25 09:37:50: down for clean Message-ID: From pnataraj at snf.stanford.edu Mon Aug 29 16:36:22 2005 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Mon, 29 Aug 2005 16:36:22 -0700 Subject: Problem sts SNF 2005-08-29 16:36:21: Nitrus flow error Message-ID: Nitrus Oxide was set at 1400 but reads only 70. Tryed couple of times with different receipe; no luck. From jperez at snf.stanford.edu Tue Aug 30 12:11:58 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 30 Aug 2005 12:11:58 -0700 Subject: Problem sts SNF 2005-08-25 09:37:50: down for clean Message-ID: Completed From jperez at snf.stanford.edu Tue Aug 30 12:13:04 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 30 Aug 2005 12:13:04 -0700 Subject: Problem sts SNF 2005-08-29 16:36:21: Nitrus flow error Message-ID: N2O gas flow error has been corrected. From jperez at snf.stanford.edu Tue Aug 30 14:18:04 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 30 Aug 2005 14:18:04 -0700 Subject: Problem sts SNF 2005-08-30 14:18:03: Slow pump not working. Message-ID: From jperez at snf.stanford.edu Tue Aug 30 14:18:50 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 30 Aug 2005 14:18:50 -0700 Subject: Problem sts SNF 2005-08-30 14:18:49: Slow pump not working Message-ID: lid slightly misalign From eenriquez at snf.stanford.edu Wed Aug 31 10:46:46 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 31 Aug 2005 10:46:46 -0700 Subject: Problem sts SNF 2005-08-17 11:42:32: NH3 down for gas tie-in Message-ID: NH3 tie-in has been completed. Nh3 has been turned back on