From mwiemer at snf.stanford.edu Fri Dec 9 17:52:29 2005 From: mwiemer at snf.stanford.edu (mwiemer at snf.stanford.edu) Date: Fri, 9 Dec 2005 17:52:29 -0800 Subject: Problem sts SNF 2005-12-09 17:52:29: O2 descum problem Message-ID: will not run O2 descum. It keeps aborting itself. It aborted itself during O2 portion of the etchback clean and aborts itself when I try to run O2 manually. The Freon-14 readout on the screen says about 11sccms are flowing even when the computer says that the freon-14 valves are closed. Wierd. The tool may be unusable. Watchout. I did not test runing any other recipies. -Mike From rohank at snf.stanford.edu Sat Dec 10 01:15:52 2005 From: rohank at snf.stanford.edu (rohank at snf.stanford.edu) Date: Sat, 10 Dec 2005 01:15:52 -0800 Subject: Problem sts SNF 2005-12-10 01:15:51: Silane Gas flow Error Message-ID: STS was in Oxide Predep step of the clean cycle. It aborted because of the 2% Silane gas flow error. Repeated the step but ran into same problem. From gibby at snf.stanford.edu Wed Dec 14 14:56:14 2005 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Wed, 14 Dec 2005 14:56:14 -0800 Subject: Comment sts SNF 2005-12-14 14:56:13: Began Clean at 1455 Message-ID: