Problem sts SNF 2005-12-09 17:52:29: O2 descum problem

mwiemer at snf.stanford.edu mwiemer at snf.stanford.edu
Fri Dec 9 17:52:29 PST 2005


will not run O2 descum. It keeps aborting itself. It aborted itself during O2 portion of the etchback clean and aborts itself when I try to run O2 manually. The Freon-14 readout on the screen says about 11sccms are flowing even when the computer says that the freon-14 valves are closed. Wierd.
The tool may be unusable. Watchout. I did not test runing any other recipies.
-Mike




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