Problem sts SNF 2005-12-10 01:15:51: Silane Gas flow Error

rohank at snf.stanford.edu rohank at snf.stanford.edu
Sat Dec 10 01:15:52 PST 2005

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STS was in Oxide Predep step of the clean cycle. It aborted because of the 2% Silane gas flow error. Repeated the step but ran into same problem.

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