Problem sts SNF 2005-12-10 01:15:51: Silane Gas flow Error

rohank at rohank at
Sat Dec 10 01:15:52 PST 2005

STS was in Oxide Predep step of the clean cycle. It aborted because of the 2% Silane gas flow error. Repeated the step but ran into same problem. 

More information about the sts-pcs mailing list