From mdickey at snf.stanford.edu Tue Feb 1 08:17:46 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 1 Feb 2005 08:17:46 -0800 Subject: Comment sts SNF 2005-02-01 08:17:44: Test Message-ID: Gas is back on line...system needs a test From jperez at snf.stanford.edu Tue Feb 1 10:42:13 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 1 Feb 2005 10:42:13 -0800 Subject: Comment sts SNF 2005-02-01 08:17:44: Test Message-ID: Top = 1064A center = 1067A Flat = 1063A left = 1064A Right = 1067A Avg = 1065A From jperez at snf.stanford.edu Tue Feb 1 10:42:35 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 1 Feb 2005 10:42:35 -0800 Subject: Shutdown sts SNF 2005-01-31 06:31:42: Bottle change Message-ID: From jperez at snf.stanford.edu Tue Feb 1 11:01:48 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 1 Feb 2005 11:01:48 -0800 Subject: Comment sts SNF 2005-01-30 13:31:38: silane flow error Message-ID: STS PECVD has an intermittent problem with 2% silane. You can do one of two things to eliminate the error on your recipe. 1) Edit 2% Silane gas tolerance from 5% to 10 % or 2) Reduce 2% Silane gas setpoint from 2000 sccm to 1950 sccm. Both types of editting had no effect on thickness, uniformity, or index of refraction. From jperez at snf.stanford.edu Tue Feb 1 11:03:33 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 1 Feb 2005 11:03:33 -0800 Subject: Comment sts SNF 2005-01-27 00:09:15: silane flow error Message-ID: Intermittent problem with 2% silane MFC. From rohank at snf.stanford.edu Wed Feb 23 22:12:40 2005 From: rohank at snf.stanford.edu (rohank at snf.stanford.edu) Date: Wed, 23 Feb 2005 22:12:40 -0800 Subject: Problem sts SNF 2005-02-23 22:12:40: Chamber doesnt vent even after 20 min. Message-ID: I am running an oxide recipe and after aborting the 16hr warm down, the chamber doesnt vent even after I allow it >20min. "venting chamber...please wait " message is on the screen but the gap between the chamber cover and the base doesnt increase.