Comment sts SNF 2005-01-30 13:31:38: silane flow error

jperez at snf.stanford.edu jperez at snf.stanford.edu
Tue Feb 1 11:01:48 PST 2005


STS PECVD has an intermittent problem with 2% silane. You 
can do one of two things to eliminate the error on your recipe.
1) Edit 2% Silane gas tolerance from 5% to 10 %
or 
2) Reduce 2% Silane gas setpoint from 2000 sccm to
 1950 sccm.
Both types of editting had no effect on thickness, uniformity,
or index of refraction.




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