Comment sts SNF 2005-01-27 00:09:15: silane flow error
jperez at snf.stanford.edu
jperez at snf.stanford.edu
Tue Feb 1 11:03:33 PST 2005
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Comment sts SNF 2005-01-30 13:31:38: silane flow error
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Problem sts SNF 2005-02-23 22:12:40: Chamber doesnt vent even after 20 min.
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Intermittent problem with 2% silane MFC.
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Comment sts SNF 2005-01-30 13:31:38: silane flow error
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Problem sts SNF 2005-02-23 22:12:40: Chamber doesnt vent even after 20 min.
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