Problem sts SNF 2005-02-23 22:12:40: Chamber doesnt vent even after 20 min.

rohank at snf.stanford.edu rohank at snf.stanford.edu
Wed Feb 23 22:12:40 PST 2005


I am running an oxide recipe and after aborting the 16hr warm down, the chamber doesnt vent even after I allow it >20min. "venting chamber...please wait " message is on the screen but the gap between the chamber cover and the base doesnt increase. 




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