From mwiemer at snf.stanford.edu Mon Jan 3 18:05:51 2005 From: mwiemer at snf.stanford.edu (mwiemer at snf.stanford.edu) Date: Mon, 3 Jan 2005 18:05:51 -0800 Subject: Comment sts SNF 2005-01-03 18:05:51: slow pump Message-ID: the slow pump is not working. when you turn the valve, nothing happens. From jperez at snf.stanford.edu Tue Jan 4 08:16:21 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 4 Jan 2005 08:16:21 -0800 Subject: Comment sts SNF 2005-01-03 18:05:51: slow pump Message-ID: Nothing happens as far as being able to hear or see when switching slow pump knob on. Wait at least 10 minutes and when you select a recipe then and only then you'll hear a softer pump sound. Remember this is a sloooooooow pump. From mwiemer at snf.stanford.edu Tue Jan 4 12:02:26 2005 From: mwiemer at snf.stanford.edu (mwiemer at snf.stanford.edu) Date: Tue, 4 Jan 2005 12:02:26 -0800 Subject: Comment sts SNF 2005-01-04 12:02:26: Slow Pump Message-ID: The slow pump in indeed not working. But the rest of the tool is working so go ahead and use it unless you need the slow pump. From jperez at snf.stanford.edu Fri Jan 7 11:53:24 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 7 Jan 2005 11:53:24 -0800 Subject: Shutdown sts SNF 2005-01-07 11:53:23: STS smoking from under lid when pump shut off Message-ID: Will need to clean system once safe to open lid. From jperez at snf.stanford.edu Wed Jan 12 16:25:01 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 12 Jan 2005 16:25:01 -0800 Subject: Shutdown sts SNF 2005-01-07 11:53:23: STS smoking from under lid when pump shut off Message-ID: STS has once afain been cleaned andis ready for oxide/nitride test. From jperez at snf.stanford.edu Wed Jan 12 16:25:56 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 12 Jan 2005 16:25:56 -0800 Subject: Comment sts SNF 2005-01-04 12:02:26: Slow Pump Message-ID: Jim Haydon fixed the problem with the slow pump. From jperez at snf.stanford.edu Wed Jan 12 16:27:54 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 12 Jan 2005 16:27:54 -0800 Subject: Problem sts SNF 2004-12-07 12:06:08: Up for Oxide recipes Message-ID: Last nitride test didn't have any faults or errors during operation. From jperez at snf.stanford.edu Wed Jan 12 16:29:04 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 12 Jan 2005 16:29:04 -0800 Subject: Problem sts SNF 2005-01-12 16:28:59: STS is ready for an Oxide/nitride test Message-ID: Please record all measurements in the log book . From jhaydon at snf.stanford.edu Thu Jan 13 10:07:58 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 13 Jan 2005 10:07:58 -0800 Subject: Problem sts SNF 2005-01-12 16:28:59: STS is ready for an Oxide/nitride test Message-ID: test completed ok to use From yetao at snf.stanford.edu Thu Jan 13 15:15:04 2005 From: yetao at snf.stanford.edu (yetao at snf.stanford.edu) Date: Thu, 13 Jan 2005 15:15:04 -0800 Subject: Shutdown sts SNF 2005-01-13 15:15:03: flood in the base Message-ID: From jhaydon at snf.stanford.edu Thu Jan 13 15:51:19 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 13 Jan 2005 15:51:19 -0800 Subject: Shutdown sts SNF 2005-01-13 15:15:03: flood in the base Message-ID: water leak repaired ok to use From mwiemer at snf.stanford.edu Thu Jan 20 14:19:51 2005 From: mwiemer at snf.stanford.edu (mwiemer at snf.stanford.edu) Date: Thu, 20 Jan 2005 14:19:51 -0800 Subject: Shutdown sts SNF 2005-01-20 14:19:49: broken Message-ID: the computer does not seem to be able to talk to the STS hardware. From jhaydon at snf.stanford.edu Thu Jan 20 14:35:29 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 20 Jan 2005 14:35:29 -0800 Subject: Shutdown sts SNF 2005-01-20 14:19:49: broken Message-ID: needed to be reset From jonroth at snf.stanford.edu Thu Jan 27 00:09:15 2005 From: jonroth at snf.stanford.edu (jonroth at snf.stanford.edu) Date: Thu, 27 Jan 2005 00:09:15 -0800 Subject: Comment sts SNF 2005-01-27 00:09:15: silane flow error Message-ID: got gas flow error during deposition 2x. Paused my deposition till I pressed a key. 1/26/05 11 PM. From dgunning at snf.stanford.edu Sun Jan 30 13:31:38 2005 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Sun, 30 Jan 2005 13:31:38 -0800 Subject: Comment sts SNF 2005-01-30 13:31:38: silane flow error Message-ID: 2% silane gas flow error occurring every 5mins on average throughout 2um SiN dep. had to hit F2 to unfreeze everytime it happened. From mdickey at snf.stanford.edu Mon Jan 31 06:31:43 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 31 Jan 2005 06:31:43 -0800 Subject: Shutdown sts SNF 2005-01-31 06:31:42: Bottle change Message-ID: Down for gas bottle change for next 24 hours