Comment sts SNF 2005-01-27 00:09:15: silane flow error

jonroth at snf.stanford.edu jonroth at snf.stanford.edu
Thu Jan 27 00:09:15 PST 2005


got gas flow error during deposition 2x.  Paused my deposition till I pressed a key.  1/26/05 11 PM.




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