Comment sts SNF 2005-01-30 13:31:38: silane flow error

dgunning at snf.stanford.edu dgunning at snf.stanford.edu
Sun Jan 30 13:31:38 PST 2005


2% silane gas flow error occurring every 5mins on average throughout 2um SiN dep.  had to hit F2 to unfreeze everytime it happened.




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