Problem sts SNF 2005-07-20 11:29:04: purge takes long time

gigi at snf.stanford.edu gigi at snf.stanford.edu
Wed Jul 20 11:29:05 PDT 2005


After/before a process, purge step takes several minutes. Pressure goes down to ~16 mTorr and fluctuates around this value.




More information about the sts-pcs mailing list