From mdickey at snf.stanford.edu  Mon Jun  6 06:13:36 2005
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Mon, 6 Jun 2005 06:13:36 -0700
Subject: Shutdown sts SNF 2005-06-06 06:13:36: Bottle change
Message-ID: <mailman.440.1357938606.25857.sts-pcs@snf.stanford.edu>

Down for gas bottle change



From mdickey at snf.stanford.edu  Tue Jun  7 06:40:46 2005
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Tue, 7 Jun 2005 06:40:46 -0700
Subject: Comment sts SNF 2005-06-07 06:40:45: Gas on line
Message-ID: <mailman.441.1357938606.25857.sts-pcs@snf.stanford.edu>

The N2/Silane is back on line. System needs a test



From jperez at snf.stanford.edu  Tue Jun  7 09:47:37 2005
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 7 Jun 2005 09:47:37 -0700
Subject: Shutdown sts SNF 2005-06-06 06:13:36: Bottle change
Message-ID: <mailman.442.1357938606.25857.sts-pcs@snf.stanford.edu>




From jperez at snf.stanford.edu  Tue Jun  7 09:48:24 2005
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 7 Jun 2005 09:48:24 -0700
Subject: Comment sts SNF 2005-06-07 06:40:45: Gas on line
Message-ID: <mailman.443.1357938606.25857.sts-pcs@snf.stanford.edu>




From alirezaa at snf.stanford.edu  Tue Jun  7 10:54:43 2005
From: alirezaa at snf.stanford.edu (alirezaa at snf.stanford.edu)
Date: Tue, 7 Jun 2005 10:54:43 -0700
Subject: Comment sts SNF 2005-06-07 10:54:42: Nitride test good after bottle change
Message-ID: <mailman.444.1357938606.25857.sts-pcs@snf.stanford.edu>




From alirezaa at snf.stanford.edu  Tue Jun  7 12:25:29 2005
From: alirezaa at snf.stanford.edu (alirezaa at snf.stanford.edu)
Date: Tue, 7 Jun 2005 12:25:29 -0700
Subject: Comment sts SNF 2005-06-07 12:25:29: Clean Cycle
Message-ID: <mailman.445.1357938606.25857.sts-pcs@snf.stanford.edu>

Started the etchback3 program



From jperez at snf.stanford.edu  Fri Jun 17 10:08:40 2005
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Fri, 17 Jun 2005 10:08:40 -0700
Subject: Problem sts SNF 2005-06-17 10:08:36: Power Failure, system in clean cycle
Message-ID: <mailman.446.1357938606.25857.sts-pcs@snf.stanford.edu>




From jhaydon at snf.stanford.edu  Fri Jun 17 10:38:56 2005
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Fri, 17 Jun 2005 10:38:56 -0700
Subject: Comment sts SNF 2005-06-17 10:38:56: 
Message-ID: <mailman.447.1357938606.25857.sts-pcs@snf.stanford.edu>

should be up after clean



From jhaydon at snf.stanford.edu  Wed Jun 22 07:35:08 2005
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Wed, 22 Jun 2005 07:35:08 -0700
Subject: Problem sts SNF 2005-06-17 10:08:36: Power Failure, system in clean cycle
Message-ID: <mailman.448.1357938606.25857.sts-pcs@snf.stanford.edu>




From jhaydon at snf.stanford.edu  Wed Jun 22 07:35:22 2005
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Wed, 22 Jun 2005 07:35:22 -0700
Subject: Comment sts SNF 2005-06-17 10:38:56: 
Message-ID: <mailman.449.1357938606.25857.sts-pcs@snf.stanford.edu>