From jperez at snf.stanford.edu Tue Mar 1 14:47:14 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 1 Mar 2005 14:47:14 -0800 Subject: Problem sts SNF 2005-02-23 22:12:40: Chamber doesnt vent even after 20 min. Message-ID: Need to pause in between pressing F3 (vent) and F1 (open valve). Tried it twice without any problems. From jperez at snf.stanford.edu Tue Mar 1 14:47:30 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 1 Mar 2005 14:47:30 -0800 Subject: Problem sts SNF 2005-03-01 14:47:30: In clean cycle Message-ID: From mdickey at snf.stanford.edu Thu Mar 3 08:11:03 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 3 Mar 2005 08:11:03 -0800 Subject: Comment sts SNF 2005-03-03 08:11:03: Gas useage level Message-ID: We are currently at a level of 30% left in the gas bottle of 2% silane balance nitrogen. If anyone has a run that requires more than normal deposition rates please contact maintenanceUseage rates show that the supply should last through the weekend. The bottle will be changed on monday morning and the tool will be down for 24 hours. Please plan accordingly. From jperez at snf.stanford.edu Fri Mar 4 13:06:56 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 4 Mar 2005 13:06:56 -0800 Subject: Comment sts SNF 2005-03-04 13:06:55: Started clean cycle at 11 AM today Message-ID: From jperez at snf.stanford.edu Fri Mar 4 14:11:19 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 4 Mar 2005 14:11:19 -0800 Subject: Problem sts SNF 2005-03-01 14:47:30: In clean cycle Message-ID: From mperez at snf.stanford.edu Mon Mar 7 15:37:25 2005 From: mperez at snf.stanford.edu (mperez at snf.stanford.edu) Date: Mon, 7 Mar 2005 15:37:25 -0800 Subject: Problem sts SNF 2005-03-07 15:37:25: Silane Low Message-ID: bottle ran low during nitride dep From yetao at snf.stanford.edu Mon Mar 7 17:07:33 2005 From: yetao at snf.stanford.edu (yetao at snf.stanford.edu) Date: Mon, 7 Mar 2005 17:07:33 -0800 Subject: Shutdown sts SNF 2005-03-07 17:07:32: silane low Message-ID: From mdickey at snf.stanford.edu Tue Mar 8 06:24:00 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 8 Mar 2005 06:24:00 -0800 Subject: Comment sts SNF 2005-03-08 06:23:59: Bottle change Message-ID: System is down for gas bottle change until 8:00 a.m. 3/9/05 From tberg at snf.stanford.edu Tue Mar 8 06:37:10 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 8 Mar 2005 06:37:10 -0800 Subject: Problem sts SNF 2005-03-07 15:37:25: Silane Low Message-ID: down for cylinder change From seymour at snf.stanford.edu Tue Mar 8 10:06:27 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 8 Mar 2005 10:06:27 -0800 Subject: Shutdown sts SNF 2005-03-07 17:07:32: silane low Message-ID: cylinder changed From seymour at snf.stanford.edu Tue Mar 8 10:06:52 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 8 Mar 2005 10:06:52 -0800 Subject: Comment sts SNF 2005-03-08 06:23:59: Bottle change Message-ID: noted From seymour at snf.stanford.edu Tue Mar 8 10:10:19 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 8 Mar 2005 10:10:19 -0800 Subject: Problem sts SNF 2005-03-08 10:10:18: N2/Silane cylinder leak check Message-ID: Gas panel checked with vacuum leak detector and passed needs test From seymour at snf.stanford.edu Tue Mar 8 10:10:39 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 8 Mar 2005 10:10:39 -0800 Subject: Comment sts SNF 2005-03-04 13:06:55: Started clean cycle at 11 AM today Message-ID: noted From seymour at snf.stanford.edu Tue Mar 8 10:10:52 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 8 Mar 2005 10:10:52 -0800 Subject: Comment sts SNF 2005-03-03 08:11:03: Gas useage level Message-ID: noted From jperez at snf.stanford.edu Fri Mar 11 08:02:38 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 11 Mar 2005 08:02:38 -0800 Subject: Problem sts SNF 2005-03-08 10:10:18: N2/Silane cylinder leak check Message-ID: Nitride test good! From yetao at snf.stanford.edu Sun Mar 13 13:30:06 2005 From: yetao at snf.stanford.edu (yetao at snf.stanford.edu) Date: Sun, 13 Mar 2005 13:30:06 -0800 Subject: Problem sts SNF 2005-03-13 13:30:05: jumpy silane flow Message-ID: flow errors once a minute or so, drops below 1800 (set at 2000) occasionally. From seoung at snf.stanford.edu Tue Mar 15 22:05:39 2005 From: seoung at snf.stanford.edu (seoung at snf.stanford.edu) Date: Tue, 15 Mar 2005 22:05:39 -0800 Subject: Problem sts SNF 2005-03-15 22:05:39: Unstable Flow Message-ID: Silane gas flow was not stable. I got numerous errors during a nitride deposition process.