Comment sts SNF 2005-03-03 08:11:03: Gas useage level

mdickey at snf.stanford.edu mdickey at snf.stanford.edu
Thu Mar 3 08:11:03 PST 2005


We are currently at a level of 30% left in the gas bottle of 2%
silane balance nitrogen. If anyone has a run that requires
more than normal deposition rates please contact maintenanceUseage rates show that the supply should last through the
weekend. The bottle will be changed on monday morning
and the tool will be down for 24 hours. Please plan accordingly.




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