Problem sts SNF 2005-11-19 21:36:52: Gas Purge Failt
jhaydon at snf.stanford.edu
jhaydon at snf.stanford.edu
Mon Nov 21 09:03:11 PST 2005
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Problem sts SNF 2005-11-19 21:36:52: Gas Purge Failt
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Problem sts SNF 2005-11-19 21:36:52: Gas Purge Failt
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Shutdown sts SNF 2005-11-29 15:26:31: Gas Flow error 2% silane double clicking
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