From pnataraj at snf.stanford.edu Sun Oct 2 13:28:15 2005 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Sun, 2 Oct 2005 13:28:15 -0700 Subject: Shutdown sts SNF 2005-10-02 13:28:14: can't get the N2O gas stabilized Message-ID: there are lots of other problems with the machine,please refer to the sts log book. From jhaydon at snf.stanford.edu Mon Oct 3 14:31:32 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 3 Oct 2005 14:31:32 -0700 Subject: Shutdown sts SNF 2005-10-02 13:28:14: can't get the N2O gas stabilized Message-ID: problem seems to have been a clogged filter From jhaydon at snf.stanford.edu Mon Oct 3 14:31:49 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 3 Oct 2005 14:31:49 -0700 Subject: Problem sts SNF 2005-09-27 10:26:17: Silane MFC faulting Message-ID: clogged filter From martinb at snf.stanford.edu Tue Oct 4 18:04:50 2005 From: martinb at snf.stanford.edu (martinb at snf.stanford.edu) Date: Tue, 4 Oct 2005 18:04:50 -0700 Subject: Problem sts SNF 2005-10-04 18:04:48: Message-ID: System error during purge: "Purge gas flow fault" > 10 x Abort / Restart STS program to get through purge From jhaydon at snf.stanford.edu Fri Oct 7 08:23:26 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 7 Oct 2005 08:23:26 -0700 Subject: Problem sts SNF 2005-10-04 18:04:48: Message-ID: could not duplicate problem From jhaydon at snf.stanford.edu Fri Oct 7 08:24:17 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 7 Oct 2005 08:24:17 -0700 Subject: Problem sts SNF 2005-09-16 13:36:13: Silane 2% MFC double clicking causing error Message-ID: problem has cleared with installation of new line filter From jhaydon at snf.stanford.edu Fri Oct 7 08:24:53 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 7 Oct 2005 08:24:53 -0700 Subject: Problem sts SNF 2005-09-16 13:22:24: "purge gas flow fault" again Message-ID: problem has cleared with new line filter From jperez at snf.stanford.edu Wed Oct 12 08:38:01 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 12 Oct 2005 08:38:01 -0700 Subject: Problem sts SNF 2005-10-12 08:38:00: Platen clean 3 error Message-ID: Freon 14, Gas flow error. 400 sccm receiving 7 sccm. From jperez at snf.stanford.edu Wed Oct 12 08:45:23 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 12 Oct 2005 08:45:23 -0700 Subject: Shutdown sts SNF 2005-10-12 08:45:23: Freon 14 low, can't clean system Message-ID: From mdickey at snf.stanford.edu Wed Oct 12 11:01:27 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 12 Oct 2005 11:01:27 -0700 Subject: Shutdown sts SNF 2005-10-12 08:45:23: Freon 14 low, can't clean system Message-ID: Freon 14 back on line From jhaydon at snf.stanford.edu Thu Oct 13 07:44:14 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 13 Oct 2005 07:44:14 -0700 Subject: Problem sts SNF 2005-10-12 08:38:00: Platen clean 3 error Message-ID: new bottle installed delay was caused by bad thread on fitting From jhaydon at snf.stanford.edu Thu Oct 13 15:21:20 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 13 Oct 2005 15:21:20 -0700 Subject: Problem sts SNF 2005-09-14 15:10:36: Hard Lid Closing Message-ID: adjusted lid From jhaydon at snf.stanford.edu Thu Oct 13 15:20:55 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 13 Oct 2005 15:20:55 -0700 Subject: Problem sts SNF 2005-09-22 10:39:06: Slow pump isn't working, even if pressure is applied Message-ID: adjusted lid From jperez at snf.stanford.edu Fri Oct 14 15:13:18 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 14 Oct 2005 15:13:18 -0700 Subject: Comment sts SNF 2005-10-14 15:13:18: System in clean cycle and no one enabled STS Message-ID: From jperez at snf.stanford.edu Mon Oct 17 09:52:19 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 17 Oct 2005 09:52:19 -0700 Subject: Problem sts SNF 2005-10-17 09:52:18: Clean cycle due to Platen having a stain appearance Message-ID: The platen appeared to have a stain appearance looking like liguid had dried or the previous etchback clean wasn't complete Also someone ran a nitride depostion and didn't log it in the logbook. From jperez at snf.stanford.edu Thu Oct 20 08:13:00 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 20 Oct 2005 08:13:00 -0700 Subject: Problem sts SNF 2005-10-17 09:52:18: Clean cycle due to Platen having a stain appearance Message-ID: After re doing the etch back 3 cycle again the platen looked normal again. Clean cycle done. From jperez at snf.stanford.edu Thu Oct 20 08:13:34 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 20 Oct 2005 08:13:34 -0700 Subject: Comment sts SNF 2005-10-14 15:13:18: System in clean cycle and no one enabled STS Message-ID: Clean Cycle done. From gibby at snf.stanford.edu Thu Oct 20 23:39:12 2005 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Thu, 20 Oct 2005 23:39:12 -0700 Subject: Problem sts SNF 2005-10-20 23:39:11: RF Tolerance Error Message-ID: Received an RF tolerance error during the first minute of each deposition of an hf oxide. Also, when the process countdown was supposed to begin on a 7:00 dep, the computer often started counting down from 16 hours before freezing in the countdown. The plasma continued even after the countdown froze. I tried loading a different program, but the problem still occurred. The only thing that seemed to help was shutting down the software and restarting it. I had to do this on each of my first two etches. From mdickey at snf.stanford.edu Fri Oct 21 14:11:42 2005 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 21 Oct 2005 14:11:42 -0700 Subject: Shutdown sts SNF 2005-10-21 14:11:41: bottle change Message-ID: Down for gas bottle change From jperez at snf.stanford.edu Tue Oct 25 13:34:48 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 25 Oct 2005 13:34:48 -0700 Subject: Problem sts SNF 2005-10-25 13:34:46: STS waiting for a part! Message-ID: STS didn't pass leak check due the CGA fitting. From seymour at snf.stanford.edu Tue Oct 25 14:31:52 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 25 Oct 2005 14:31:52 -0700 Subject: Shutdown sts SNF 2005-10-21 14:11:41: bottle change Message-ID: silane/nitrogen passed leak check. needs testing From seymour at snf.stanford.edu Tue Oct 25 14:33:18 2005 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 25 Oct 2005 14:33:18 -0700 Subject: Problem sts SNF 2005-10-25 13:34:46: STS waiting for a part! Message-ID: CGA connector replaced and tested good. STS needs test. From martinb at snf.stanford.edu Fri Oct 28 20:31:33 2005 From: martinb at snf.stanford.edu (martinb at snf.stanford.edu) Date: Fri, 28 Oct 2005 20:31:33 -0700 Subject: Problem sts SNF 2005-10-28 20:31:32: Silane gas flow errors Message-ID: Had over 10 Silane gas flow errors within a 20 min deposition. The Silane flow seems to be very unstable; MFC problem? From jperez at snf.stanford.edu Mon Oct 31 14:12:09 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 31 Oct 2005 14:12:09 -0800 Subject: Problem sts SNF 2005-10-28 20:31:32: Silane gas flow errors Message-ID: Adjusted the PSI pressure and it seems to have stablized the 2% Silane gas flow. Ran nitride recipe with a 2000 sccm flow and was stable for eight minutes. From jperez at snf.stanford.edu Mon Oct 31 14:25:05 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 31 Oct 2005 14:25:05 -0800 Subject: Problem sts SNF 2005-10-20 23:39:11: RF Tolerance Error Message-ID: The 16 hour fluk that appears occasionally when processing is meaning less. The inner clock does work, so if your recipe time is for five minutes and if the clock is stuck with 16 hours it'll stop processing in five minutes as indicated in your recipe. For the RF tolerance error, we are still working on that problem.