From seoung at snf.stanford.edu Wed Sep 7 16:32:39 2005 From: seoung at snf.stanford.edu (seoung at snf.stanford.edu) Date: Wed, 7 Sep 2005 16:32:39 -0700 Subject: Shutdown sts SNF 2005-09-07 16:32:38: A broken wire Message-ID: A wire from the lid was damaged. It needs to be replaced. From jhaydon at snf.stanford.edu Thu Sep 8 08:49:11 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 8 Sep 2005 08:49:11 -0700 Subject: Shutdown sts SNF 2005-09-07 16:32:38: A broken wire Message-ID: ground strap repaired ok to use From wasserbauer at snf.stanford.edu Mon Sep 12 12:02:38 2005 From: wasserbauer at snf.stanford.edu (wasserbauer at snf.stanford.edu) Date: Mon, 12 Sep 2005 12:02:38 -0700 Subject: Problem sts SNF 2005-09-12 12:02:37: STS purge Message-ID: STS displays "Purge gas flow fault" after run complete. Shutdown (F1), type c:\STS\process, wait. Faults again. Repeated 4X. Samples are loaded. Please help rescue samples. From jperez at snf.stanford.edu Tue Sep 13 08:55:56 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 13 Sep 2005 08:55:56 -0700 Subject: Shutdown sts SNF 2005-09-13 08:55:55: System error Message-ID: Silane MFC double clicking and system faults. Reboot computer, but no difference. From jperez at snf.stanford.edu Tue Sep 13 10:04:58 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 13 Sep 2005 10:04:58 -0700 Subject: Shutdown sts SNF 2005-09-13 08:55:55: System error Message-ID: Jim Haydon adjusted the silane MFC From jperez at snf.stanford.edu Tue Sep 13 10:06:36 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 13 Sep 2005 10:06:36 -0700 Subject: Problem sts SNF 2005-09-12 12:02:37: STS purge Message-ID: silane MFC adjusted, ran through the purge cycle without an error. From gibby at snf.stanford.edu Wed Sep 14 15:10:37 2005 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Wed, 14 Sep 2005 15:10:37 -0700 Subject: Problem sts SNF 2005-09-14 15:10:36: Hard Lid Closing Message-ID: The lid doesn't seem to shut all the way so that when the chamber is initially pumped out, the whole machine shudders as hard contact is made From jqguo at snf.stanford.edu Fri Sep 16 13:22:26 2005 From: jqguo at snf.stanford.edu (jqguo at snf.stanford.edu) Date: Fri, 16 Sep 2005 13:22:26 -0700 Subject: Problem sts SNF 2005-09-16 13:22:24: "purge gas flow fault" again Message-ID: "purge gas flow fault" error again when abort from the "16hr standby" after the oxpredep. From jperez at snf.stanford.edu Fri Sep 16 13:36:21 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 16 Sep 2005 13:36:21 -0700 Subject: Problem sts SNF 2005-09-16 13:36:13: Silane 2% MFC double clicking causing error Message-ID: From jperez at snf.stanford.edu Thu Sep 22 10:39:10 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 22 Sep 2005 10:39:10 -0700 Subject: Problem sts SNF 2005-09-22 10:39:06: Slow pump isn't working, even if pressure is applied Message-ID: From jhaydon at snf.stanford.edu Mon Sep 26 13:57:52 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 26 Sep 2005 13:57:52 -0700 Subject: Problem sts SNF 2005-08-30 14:18:03: Slow pump not working. Message-ID: From jhaydon at snf.stanford.edu Mon Sep 26 13:58:03 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 26 Sep 2005 13:58:03 -0700 Subject: Problem sts SNF 2005-08-30 14:18:49: Slow pump not working Message-ID: From jperez at snf.stanford.edu Tue Sep 27 10:26:17 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 27 Sep 2005 10:26:17 -0700 Subject: Problem sts SNF 2005-09-27 10:26:17: Silane MFC faulting Message-ID: It took me 30 plus aborts just trying to finish the gas purge cycle. After mislam finishes his scheduled time, the system will go down for a clean. From jperez at snf.stanford.edu Tue Sep 27 11:31:27 2005 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 27 Sep 2005 11:31:27 -0700 Subject: Shutdown sts SNF 2005-09-27 11:31:26: MFCs for Nitrus Ox. and 2% Silane unable to control Message-ID: Gas flows VERY UNSTABLE. From jhaydon at snf.stanford.edu Wed Sep 28 09:45:22 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 28 Sep 2005 09:45:22 -0700 Subject: Shutdown sts SNF 2005-09-27 11:31:26: MFCs for Nitrus Ox. and 2% Silane unable to control Message-ID: Mfc's for Nitrus and silane flakey will try o2