From mdickey at snf.stanford.edu Wed Aug 2 08:05:13 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 2 Aug 2006 08:05:13 -0700 Subject: Shutdown sts SNF 2006-08-02 08:05:13: bottle change Message-ID: Down for bottle change....N20 From jperez at snf.stanford.edu Mon Aug 7 12:31:45 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 7 Aug 2006 12:31:45 -0700 Subject: Shutdown sts SNF 2006-08-02 08:05:13: bottle change Message-ID: Bottle change complete for N2O, needs a test. Water leak fixed. Test low frequency oxide From jperez at snf.stanford.edu Mon Aug 7 15:27:15 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 7 Aug 2006 15:27:15 -0700 Subject: Problem sts SNF 2006-08-07 15:27:15: Needs a oxide test ran. Message-ID: From mdickey at snf.stanford.edu Fri Aug 11 07:05:02 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Aug 2006 07:05:02 -0700 Subject: Comment sts SNF 2006-08-11 07:05:01: Gas low Message-ID: The N2/Silane gas bottle is low. Please be advised and use accordingly. From mdickey at snf.stanford.edu Mon Aug 14 12:39:27 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 14 Aug 2006 12:39:27 -0700 Subject: Shutdown sts SNF 2006-08-14 12:39:26: gas bottle change Message-ID: Down for N2/Silane bottle change From jperez at snf.stanford.edu Tue Aug 15 08:07:31 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 15 Aug 2006 08:07:31 -0700 Subject: Shutdown sts SNF 2006-08-14 12:39:26: gas bottle change Message-ID: Bottle change complete. From jperez at snf.stanford.edu Tue Aug 15 08:08:16 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 15 Aug 2006 08:08:16 -0700 Subject: Comment sts SNF 2006-08-11 07:05:01: Gas low Message-ID: Silane 2% bottle change complete. From jperez at snf.stanford.edu Tue Aug 15 11:10:55 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 15 Aug 2006 11:10:55 -0700 Subject: Problem sts SNF 2006-08-07 15:27:15: Needs a oxide test ran. Message-ID: Did a high frequency test, target 1000 A and got 970 A. System OK to use. Dep rate slowly dropping From kimsangb at snf.stanford.edu Sun Aug 20 23:48:29 2006 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Sun, 20 Aug 2006 23:48:29 -0700 Subject: Problem sts SNF 2006-08-20 23:48:29: vinyl glove was burnt at the edge Message-ID: I forgot to take off vinyl gloves and a small piece of it was burnt at the edge of the plate. I scratched the with wafer piece and blew off the ash. I also ran O2 descum, but I am not sure whether it is enough. From jperez at snf.stanford.edu Tue Aug 22 09:15:47 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 22 Aug 2006 09:15:47 -0700 Subject: Problem sts SNF 2006-08-20 23:48:29: vinyl glove was burnt at the edge Message-ID: O2 descum completed after leaving burnt vinyl from glove. From jhaydon at snf.stanford.edu Wed Aug 23 09:10:16 2006 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 23 Aug 2006 09:10:16 -0700 Subject: Problem sts SNF 2006-06-29 11:16:59: Test for Low Frequency, uniformity failed due to RF errors Message-ID: low frequency faulting fixed but still some uniformity