From dgunning at snf.stanford.edu Fri Dec 1 03:36:06 2006 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Fri, 1 Dec 2006 03:36:06 -0800 Subject: Problem sts SNF 2006-12-01 03:36:05: silane tolerance error Message-ID: Gas flow error on 2% silane that would not clear...flow was reading 0sccm. aborted SiN deposition and unloaded samples. From mdickey at snf.stanford.edu Fri Dec 1 06:26:31 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 1 Dec 2006 06:26:31 -0800 Subject: Shutdown sts SNF 2006-12-01 06:26:30: Bottle cross over Message-ID: The N2/Silane bottle needs to be switched over before this gas can be run From jperez at snf.stanford.edu Fri Dec 1 10:15:42 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 1 Dec 2006 10:15:42 -0800 Subject: Shutdown sts SNF 2006-12-01 06:26:30: Bottle cross over Message-ID: 2% silane bottle change has been completed. Test result from nitride deposition, avg. 992.OK to use T= 971 C= 992 B= 997 R= 981 L= 1017 From jperez at snf.stanford.edu Fri Dec 1 10:16:10 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 1 Dec 2006 10:16:10 -0800 Subject: Problem sts SNF 2006-12-01 03:36:05: silane tolerance error Message-ID: Ran out of 2% silane, bottle changed From jperez at snf.stanford.edu Fri Dec 1 10:16:26 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 1 Dec 2006 10:16:26 -0800 Subject: Comment sts SNF 2006-11-29 19:02:23: Clean cycle started: etchback 3 at 7:00pm Message-ID: completed clean From jperez at snf.stanford.edu Fri Dec 1 10:17:09 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 1 Dec 2006 10:17:09 -0800 Subject: Comment sts SNF 2006-11-22 10:16:02: Down Through Weekend Message-ID: OK to use, Burn box fixed From jperez at snf.stanford.edu Fri Dec 1 10:17:29 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 1 Dec 2006 10:17:29 -0800 Subject: Comment sts SNF 2006-11-21 10:05:14: Level switch Message-ID: Has been replaced From jperez at snf.stanford.edu Fri Dec 1 10:17:50 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 1 Dec 2006 10:17:50 -0800 Subject: Comment sts SNF 2006-11-16 14:02:10: removed reservation for today Message-ID: OK From jperez at snf.stanford.edu Fri Dec 1 10:18:30 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 1 Dec 2006 10:18:30 -0800 Subject: Comment sts SNF 2006-09-28 15:20:20: Waiting on new part to replace with modified part. Message-ID: Part midified. From rcordova at snf.stanford.edu Sun Dec 3 09:17:22 2006 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Sun, 3 Dec 2006 09:17:22 -0800 Subject: Comment sts SNF 2006-12-03 09:17:22: Restarted Etchback3 Message-ID: System aborted during wall clean 1. Restarted at 9:30 am From jperez at snf.stanford.edu Mon Dec 4 09:24:55 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 4 Dec 2006 09:24:55 -0800 Subject: Comment sts SNF 2006-12-03 09:17:22: Restarted Etchback3 Message-ID: Clean cycle completed. From jperez at snf.stanford.edu Mon Dec 4 09:28:09 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 4 Dec 2006 09:28:09 -0800 Subject: Problem sts SNF 2006-12-04 09:28:09: Low Frequency process has poor unformity Message-ID: Can not get reflected power below 2 watts. From pleu at snf.stanford.edu Mon Dec 4 13:08:08 2006 From: pleu at snf.stanford.edu (pleu at snf.stanford.edu) Date: Mon, 4 Dec 2006 13:08:08 -0800 Subject: Comment sts SNF 2006-12-04 13:08:08: low temperature Message-ID: The temperature seems stabilized around 343 C instead of 350 C From pleu at snf.stanford.edu Mon Dec 4 13:35:31 2006 From: pleu at snf.stanford.edu (pleu at snf.stanford.edu) Date: Mon, 4 Dec 2006 13:35:31 -0800 Subject: Comment sts SNF 2006-12-04 13:35:30: venting Message-ID: the machine would not vent and I had to restart the machine with Ctrl-Alt-Del in order to take my samples out From jperez at snf.stanford.edu Tue Dec 5 09:52:09 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 5 Dec 2006 09:52:09 -0800 Subject: Comment sts SNF 2006-12-04 13:08:08: low temperature Message-ID: User did a reboot and depending on how long it took, will determine on how long temperature will recover. OK now! From jperez at snf.stanford.edu Tue Dec 5 09:54:12 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 5 Dec 2006 09:54:12 -0800 Subject: Comment sts SNF 2006-12-04 13:35:30: venting Message-ID: Software couldn't keep up with fast fingers. You need to pause for a couple of seconds between F3 Vent and F1 open valve.