Problem sts SNF 2006-12-01 03:36:05: silane tolerance error

dgunning at snf.stanford.edu dgunning at snf.stanford.edu
Fri Dec 1 03:36:06 PST 2006


Gas flow error on 2% silane that would not clear...flow was reading 0sccm.  aborted  SiN deposition and unloaded samples.




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