Shutdown sts SNF 2006-12-01 06:26:30: Bottle cross over

jperez at snf.stanford.edu jperez at snf.stanford.edu
Fri Dec 1 10:15:42 PST 2006


2% silane bottle change has been completed.
Test result from nitride deposition, avg. 992.OK to use
T= 971
C= 992
B= 997
R= 981
L= 1017




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