Comment sts SNF 2006-12-03 09:17:22: Restarted Etchback3
jperez at snf.stanford.edu
jperez at snf.stanford.edu
Mon Dec 4 09:24:55 PST 2006
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Comment sts SNF 2006-12-03 09:17:22: Restarted Etchback3
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Problem sts SNF 2006-12-04 09:28:09: Low Frequency process has poor unformity
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Clean cycle completed.
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Comment sts SNF 2006-12-03 09:17:22: Restarted Etchback3
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Problem sts SNF 2006-12-04 09:28:09: Low Frequency process has poor unformity
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