From jperez at snf.stanford.edu  Tue Jan  3 09:10:37 2006
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 3 Jan 2006 09:10:37 -0800
Subject: Comment sts SNF 2005-12-14 14:56:13: Began Clean at 1455
Message-ID: <mailman.527.1357938607.25857.sts-pcs@snf.stanford.edu>

COMPLETED



From jperez at snf.stanford.edu  Tue Jan  3 09:11:04 2006
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 3 Jan 2006 09:11:04 -0800
Subject: Problem sts SNF 2005-12-10 01:15:51: Silane Gas flow Error
Message-ID: <mailman.528.1357938607.25857.sts-pcs@snf.stanford.edu>

CLEANED FILTER



From jperez at snf.stanford.edu  Tue Jan  3 09:11:46 2006
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 3 Jan 2006 09:11:46 -0800
Subject: Problem sts SNF 2005-12-09 17:52:29: O2 descum problem
Message-ID: <mailman.529.1357938607.25857.sts-pcs@snf.stanford.edu>

PROBLEM RESOLVED!



From jperez at snf.stanford.edu  Tue Jan  3 09:12:14 2006
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 3 Jan 2006 09:12:14 -0800
Subject: Problem sts SNF 2006-01-03 09:12:14: STARTED CLEAN CYCLE
Message-ID: <mailman.530.1357938607.25857.sts-pcs@snf.stanford.edu>




From jperez at snf.stanford.edu  Tue Jan  3 15:45:11 2006
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 3 Jan 2006 15:45:11 -0800
Subject: Problem sts SNF 2006-01-03 15:45:11: Low Frequency RF error
Message-ID: <mailman.531.1357938607.25857.sts-pcs@snf.stanford.edu>




From jperez at snf.stanford.edu  Mon Jan  9 10:17:14 2006
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Mon, 9 Jan 2006 10:17:14 -0800
Subject: Problem sts SNF 2006-01-09 10:17:14: 2 % Silane flow unstable 1824 - 2044 sccm
Message-ID: <mailman.532.1357938607.25857.sts-pcs@snf.stanford.edu>




From jhaydon at snf.stanford.edu  Mon Jan  9 11:03:46 2006
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Mon, 9 Jan 2006 11:03:46 -0800
Subject: Problem sts SNF 2006-01-09 10:17:14: 2 % Silane flow unstable 1824 - 2044 sccm
Message-ID: <mailman.533.1357938607.25857.sts-pcs@snf.stanford.edu>

adjusted gas bottle pressure to 30 psi



From jperez at snf.stanford.edu  Fri Jan 20 09:12:57 2006
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Fri, 20 Jan 2006 09:12:57 -0800
Subject: Problem sts SNF 2006-01-03 09:12:14: STARTED CLEAN CYCLE
Message-ID: <mailman.534.1357938607.25857.sts-pcs@snf.stanford.edu>

completed



From wasserbauer at snf.stanford.edu  Mon Jan 23 17:53:38 2006
From: wasserbauer at snf.stanford.edu (wasserbauer at snf.stanford.edu)
Date: Mon, 23 Jan 2006 17:53:38 -0800
Subject: Problem sts SNF 2006-01-23 17:53:36: Etchback3 Error
Message-ID: <mailman.535.1357938607.25857.sts-pcs@snf.stanford.edu>

Initiated Etchback3 process @ 17:00 1/23/06.  Kept getting the following error:
Platen Clean 1
RF 2 Power tolerance error
I aborted the run.



From mwiemer at snf.stanford.edu  Thu Jan 26 14:37:17 2006
From: mwiemer at snf.stanford.edu (mwiemer at snf.stanford.edu)
Date: Thu, 26 Jan 2006 14:37:17 -0800
Subject: Shutdown sts SNF 2006-01-26 14:37:17: N2 Silane Change
Message-ID: <mailman.536.1357938607.25857.sts-pcs@snf.stanford.edu>

bottle change.



From tberg at snf.stanford.edu  Fri Jan 27 10:04:12 2006
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Fri, 27 Jan 2006 10:04:12 -0800
Subject: Shutdown sts SNF 2006-01-26 14:37:17: N2 Silane Change
Message-ID: <mailman.537.1357938607.25857.sts-pcs@snf.stanford.edu>

Cylinder Changed and leak checked. Ready for test