January 2006 Archives by thread

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Starting: Tue Jan 3 09:10:37 PST 2006
Ending: Fri Jan 27 10:04:12 PST 2006
Messages: 11

• Comment sts SNF 2005-12-14 14:56:13: Began Clean at 1455   jperez at snf.stanford.edu
• Problem sts SNF 2005-12-10 01:15:51: Silane Gas flow Error   jperez at snf.stanford.edu
• Problem sts SNF 2005-12-09 17:52:29: O2 descum problem   jperez at snf.stanford.edu
• Problem sts SNF 2006-01-03 09:12:14: STARTED CLEAN CYCLE   jperez at snf.stanford.edu
  • Problem sts SNF 2006-01-03 09:12:14: STARTED CLEAN CYCLE   jperez at snf.stanford.edu
• Problem sts SNF 2006-01-03 15:45:11: Low Frequency RF error   jperez at snf.stanford.edu
• Problem sts SNF 2006-01-09 10:17:14: 2 % Silane flow unstable 1824 - 2044 sccm   jperez at snf.stanford.edu
  • Problem sts SNF 2006-01-09 10:17:14: 2 % Silane flow unstable 1824 - 2044 sccm   jhaydon at snf.stanford.edu
• Problem sts SNF 2006-01-23 17:53:36: Etchback3 Error   wasserbauer at snf.stanford.edu
• Shutdown sts SNF 2006-01-26 14:37:17: N2 Silane Change   mwiemer at snf.stanford.edu
  • Shutdown sts SNF 2006-01-26 14:37:17: N2 Silane Change   tberg at snf.stanford.edu

Last message date: Fri Jan 27 10:04:12 PST 2006
Archived on: Fri Jan 11 13:10:23 PST 2013

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