From kimsangb at snf.stanford.edu  Wed Jun 21 09:44:58 2006
From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu)
Date: Wed, 21 Jun 2006 09:44:58 -0700
Subject: Problem sts SNF 2006-06-21 09:44:56: RF2 Power Tolerance Error
Message-ID: <mailman.558.1357938607.25857.sts-pcs@snf.stanford.edu>

RF2 Power Tolerance Error during cleaning (ETCHBAK3-Platen Clean1)
Resumed.



From jhaydon at snf.stanford.edu  Fri Jun 23 08:34:31 2006
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Fri, 23 Jun 2006 08:34:31 -0700
Subject: Problem sts SNF 2006-06-23 08:34:25: shut down Monday for n2silane bottle change
Message-ID: <mailman.559.1357938607.25857.sts-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Mon Jun 26 07:39:27 2006
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 26 Jun 2006 07:39:27 -0700
Subject: Shutdown sts SNF 2006-06-26 07:39:25: 
Message-ID: <mailman.560.1357938607.25857.sts-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Mon Jun 26 08:28:27 2006
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 26 Jun 2006 08:28:27 -0700
Subject: Shutdown sts SNF 2006-06-26 08:28:27: cylinder changed
Message-ID: <mailman.561.1357938607.25857.sts-pcs@snf.stanford.edu>

on leak test



From seymour at snf.stanford.edu  Mon Jun 26 08:29:25 2006
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 26 Jun 2006 08:29:25 -0700
Subject: Shutdown sts SNF 2006-06-26 07:39:25: 
Message-ID: <mailman.562.1357938607.25857.sts-pcs@snf.stanford.edu>

SiH2/N2



From seymour at snf.stanford.edu  Tue Jun 27 10:10:15 2006
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Tue, 27 Jun 2006 10:10:15 -0700
Subject: Shutdown sts SNF 2006-06-26 08:28:27: cylinder changed
Message-ID: <mailman.563.1357938607.25857.sts-pcs@snf.stanford.edu>

leak checl passed needs test



From seymour at snf.stanford.edu  Tue Jun 27 10:10:37 2006
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Tue, 27 Jun 2006 10:10:37 -0700
Subject: Problem sts SNF 2006-06-23 08:34:25: shut down Monday for n2silane bottle change
Message-ID: <mailman.564.1357938607.25857.sts-pcs@snf.stanford.edu>

completed cylinder change



From jperez at snf.stanford.edu  Tue Jun 27 12:05:07 2006
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 27 Jun 2006 12:05:07 -0700
Subject: Comment sts SNF 2006-06-27 12:05:06: Test done, Index of Refraction was high 1.48
Message-ID: <mailman.565.1357938607.25857.sts-pcs@snf.stanford.edu>




From jperez at snf.stanford.edu  Thu Jun 29 11:17:00 2006
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Thu, 29 Jun 2006 11:17:00 -0700
Subject: Problem sts SNF 2006-06-29 11:16:59: Test for Low Frequency, uniformity failed due to RF errors
Message-ID: <mailman.566.1357938607.25857.sts-pcs@snf.stanford.edu>

Jim isn't sure which part is bad (maybe more than one). He 
has been working on ordering parts, but the system is old and parts are hard to come by. Test results from three wafers;
6/27/06 Two wafers front and back
Front wfr avg. 956 A, delta 30 A
Back wfr avg. 941 A delta 104 A
6/28/06 2nd test, single wfr was;
center avg. 946 A, delta 57A
 



From jperez at snf.stanford.edu  Thu Jun 29 11:24:46 2006
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Thu, 29 Jun 2006 11:24:46 -0700
Subject: Comment sts SNF 2006-06-27 12:05:06: Test done, Index of Refraction was high 1.48
Message-ID: <mailman.567.1357938607.25857.sts-pcs@snf.stanford.edu>

Test was done with low frequency, due to RF errors uniformity
range is high. High Frequency test was excellent;
Center t.w. avg. 1072, delta 4 A. Index of refraction 1.47