Problem sts SNF 2006-06-29 11:16:59: Test for Low Frequency, uniformity failed due to RF errors

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu Jun 29 11:17:00 PDT 2006


Jim isn't sure which part is bad (maybe more than one). He 
has been working on ordering parts, but the system is old and parts are hard to come by. Test results from three wafers;
6/27/06 Two wafers front and back
Front wfr avg. 956 A, delta 30 A
Back wfr avg. 941 A delta 104 A
6/28/06 2nd test, single wfr was;
center avg. 946 A, delta 57A
 




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