From jperez at snf.stanford.edu  Thu May  4 09:45:56 2006
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Thu, 4 May 2006 09:45:56 -0700
Subject: Shutdown sts SNF 2006-05-04 09:45:54: 2%silane bottle change
Message-ID: <mailman.549.1357938607.25857.sts-pcs@snf.stanford.edu>




From jperez at snf.stanford.edu  Fri May  5 09:52:31 2006
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Fri, 5 May 2006 09:52:31 -0700
Subject: Shutdown sts SNF 2006-05-04 09:45:54: 2%silane bottle change
Message-ID: <mailman.550.1357938607.25857.sts-pcs@snf.stanford.edu>

A high Frequency test was ran after 2% silane bottle;
T 1060, C 1065, F 1065, L 1069, R 1056 
Avg.  1063, delta 13A. Uniformity less than 1% across the test
wafer.



From fengj at snf.stanford.edu  Mon May 15 08:54:21 2006
From: fengj at snf.stanford.edu (fengj at snf.stanford.edu)
Date: Mon, 15 May 2006 08:54:21 -0700
Subject: Problem sts SNF 2006-05-15 08:54:20: load noise when pumping the chamber
Message-ID: <mailman.551.1357938607.25857.sts-pcs@snf.stanford.edu>

There was a loud noise from the back of the machine when I finished my process and then started pumping the chamber. But the machine finished the pumping and returned to the idle mode.



From tberg at snf.stanford.edu  Mon May 22 07:48:09 2006
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 22 May 2006 07:48:09 -0700
Subject: Shutdown sts SNF 2006-05-22 07:48:08: shutdown for water and air tie ins
Message-ID: <mailman.552.1357938607.25857.sts-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Mon May 22 09:02:31 2006
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 22 May 2006 09:02:31 -0700
Subject: Shutdown sts SNF 2006-05-22 07:48:08: shutdown for water and air tie ins
Message-ID: <mailman.553.1357938607.25857.sts-pcs@snf.stanford.edu>

tie in completed



From ofidaner at snf.stanford.edu  Tue May 23 14:23:55 2006
From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu)
Date: Tue, 23 May 2006 14:23:55 -0700
Subject: Shutdown sts SNF 2006-05-23 14:23:55: system error
Message-ID: <mailman.554.1357938607.25857.sts-pcs@snf.stanford.edu>

module serial communications fault



From jperez at snf.stanford.edu  Wed May 24 10:18:08 2006
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Wed, 24 May 2006 10:18:08 -0700
Subject: Problem sts SNF 2006-05-15 08:54:20: load noise when pumping the chamber
Message-ID: <mailman.555.1357938607.25857.sts-pcs@snf.stanford.edu>

Problem fixed



From jperez at snf.stanford.edu  Wed May 24 10:19:54 2006
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Wed, 24 May 2006 10:19:54 -0700
Subject: Problem sts SNF 2006-04-21 18:53:02: actual power was lower than what was set
Message-ID: <mailman.556.1357938607.25857.sts-pcs@snf.stanford.edu>

Within 30 seconds the power reaches it setpoint. We are wait-
ing for parts to correct this problem.



From jhaydon at snf.stanford.edu  Wed May 24 11:21:30 2006
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Wed, 24 May 2006 11:21:30 -0700
Subject: Shutdown sts SNF 2006-05-23 14:23:55: system error
Message-ID: <mailman.557.1357938607.25857.sts-pcs@snf.stanford.edu>

computer rebooted