Shutdown sts SNF 2006-05-04 09:45:54: 2%silane bottle change

jperez at snf.stanford.edu jperez at snf.stanford.edu
Fri May 5 09:52:31 PDT 2006


A high Frequency test was ran after 2% silane bottle;
T 1060, C 1065, F 1065, L 1069, R 1056 
Avg.  1063, delta 13A. Uniformity less than 1% across the test
wafer.




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