Problem sts SNF 2006-05-15 08:54:20: load noise when pumping the chamber

fengj at snf.stanford.edu fengj at snf.stanford.edu
Mon May 15 08:54:21 PDT 2006


There was a loud noise from the back of the machine when I finished my process and then started pumping the chamber. But the machine finished the pumping and returned to the idle mode.




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