From jonroth at snf.stanford.edu Wed Nov 1 10:49:54 2006 From: jonroth at snf.stanford.edu (jonroth at snf.stanford.edu) Date: Wed, 1 Nov 2006 10:49:54 -0800 Subject: Comment sts SNF 2006-11-01 10:49:53: Clean Cycle Message-ID: From rcordova at snf.stanford.edu Fri Nov 3 11:53:12 2006 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Fri, 3 Nov 2006 11:53:12 -0800 Subject: Comment sts SNF 2006-11-03 11:53:11: Clean cycle started Message-ID: Started clean at 11:45 am. Etchback3 running From chen0622 at snf.stanford.edu Fri Nov 3 17:54:19 2006 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Fri, 3 Nov 2006 17:54:19 -0800 Subject: Problem sts SNF 2006-11-03 17:54:18: the process timer is frozen today twice Message-ID: the process timer is frozen twice in the depostion cycle. From rcordova at snf.stanford.edu Sun Nov 5 10:05:30 2006 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Sun, 5 Nov 2006 10:05:30 -0800 Subject: Comment sts SNF 2006-11-05 10:05:29: Clean cycle started Message-ID: Clean cycle has started at 10:05 am 11/05 Etchbak3 From jperez at snf.stanford.edu Tue Nov 7 06:20:28 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 7 Nov 2006 06:20:28 -0800 Subject: Comment sts SNF 2006-11-05 10:05:29: Clean cycle started Message-ID: Completed From jperez at snf.stanford.edu Tue Nov 7 06:20:55 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 7 Nov 2006 06:20:55 -0800 Subject: Problem sts SNF 2006-11-03 17:54:18: the process timer is frozen today twice Message-ID: Inner clock works! From jperez at snf.stanford.edu Tue Nov 7 06:21:12 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 7 Nov 2006 06:21:12 -0800 Subject: Comment sts SNF 2006-11-03 11:53:11: Clean cycle started Message-ID: Completed From jperez at snf.stanford.edu Tue Nov 7 06:21:30 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 7 Nov 2006 06:21:30 -0800 Subject: Comment sts SNF 2006-11-01 10:49:53: Clean Cycle Message-ID: Completed From jonroth at snf.stanford.edu Fri Nov 10 17:06:55 2006 From: jonroth at snf.stanford.edu (jonroth at snf.stanford.edu) Date: Fri, 10 Nov 2006 17:06:55 -0800 Subject: Comment sts SNF 2006-11-10 17:06:55: mark on platen Message-ID: when I started today there was some shiny spot on the platen. maybe contamination. From jperez at snf.stanford.edu Mon Nov 13 14:28:39 2006 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 13 Nov 2006 14:28:39 -0800 Subject: Comment sts SNF 2006-11-10 17:06:55: mark on platen Message-ID: I vented the chamber and saw nothing different or unusual. Some of the white marks are from previous users who forgot to take off their vinyl gloves. From praveen at snf.stanford.edu Thu Nov 16 14:02:11 2006 From: praveen at snf.stanford.edu (praveen at snf.stanford.edu) Date: Thu, 16 Nov 2006 14:02:11 -0800 Subject: Comment sts SNF 2006-11-16 14:02:10: removed reservation for today Message-ID: samples not ready From emyers at snf.stanford.edu Mon Nov 20 17:19:04 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 20 Nov 2006 17:19:04 -0800 Subject: Shutdown sts SNF 2006-11-20 17:19:04: Shutdown For Burn Box Message-ID: Aborted process wirh 2:40:00 Left. Wafer still in chamber From mdickey at snf.stanford.edu Tue Nov 21 10:05:14 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 21 Nov 2006 10:05:14 -0800 Subject: Comment sts SNF 2006-11-21 10:05:14: Level switch Message-ID: The part supplier came in to pick up teh defective part for the burnbox. Should get an answer today on availability. From emyers at snf.stanford.edu Wed Nov 22 10:16:03 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 22 Nov 2006 10:16:03 -0800 Subject: Comment sts SNF 2006-11-22 10:16:02: Down Through Weekend Message-ID: Replacement Part estimated time of arrival is Monday Nov. 27 From jhaydon at snf.stanford.edu Mon Nov 27 15:28:11 2006 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 27 Nov 2006 15:28:11 -0800 Subject: Shutdown sts SNF 2006-11-20 17:19:04: Shutdown For Burn Box Message-ID: new level switch installed sunp is now working From rcordova at snf.stanford.edu Wed Nov 29 19:02:24 2006 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Wed, 29 Nov 2006 19:02:24 -0800 Subject: Comment sts SNF 2006-11-29 19:02:23: Clean cycle started: etchback 3 at 7:00pm Message-ID: