From jperez at snf.stanford.edu  Wed Oct  4 10:04:01 2006
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Wed, 4 Oct 2006 10:04:01 -0700
Subject: Problem sts SNF 2006-09-29 11:36:16: 2% silane 2000 sccm fluctuating from 2000-1766
Message-ID: <mailman.590.1357938608.25857.sts-pcs@snf.stanford.edu>

Jim Haydon adjusted pressure outside the dock area.
Ran Nitride test  and set 2% silane tolerance back to 5%.
The range only fluctuated <1%. If you changed your tolerance
to13% for this past weekend, please change back to the 
standard 5% for 2% silane gas.
Thanks,



From rcordova at snf.stanford.edu  Sat Oct  7 13:03:33 2006
From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu)
Date: Sat, 7 Oct 2006 13:03:33 -0700
Subject: Comment sts SNF 2006-10-07 13:03:32: STS near 4.5,
Message-ID: <mailman.591.1357938608.25857.sts-pcs@snf.stanford.edu>

Started clean with total dep of 4.39



From rcordova at snf.stanford.edu  Sat Oct  7 13:04:08 2006
From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu)
Date: Sat, 7 Oct 2006 13:04:08 -0700
Subject: Problem sts SNF 2006-10-07 13:04:08: STS in Clean cycle
Message-ID: <mailman.592.1357938608.25857.sts-pcs@snf.stanford.edu>

Started at 13:00 pm 10/7/06



From rcordova at snf.stanford.edu  Tue Oct 10 09:30:46 2006
From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu)
Date: Tue, 10 Oct 2006 09:30:46 -0700
Subject: Shutdown sts SNF 2006-10-10 09:30:46: As per staff, 
Message-ID: <mailman.593.1357938608.25857.sts-pcs@snf.stanford.edu>

this system was not to be used during exhaust work...



From rcrane at snf.stanford.edu  Tue Oct 10 10:00:05 2006
From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu)
Date: Tue, 10 Oct 2006 10:00:05 -0700
Subject: Problem sts SNF 2006-10-07 13:04:08: STS in Clean cycle
Message-ID: <mailman.594.1357938608.25857.sts-pcs@snf.stanford.edu>

completed



From mahnaz at snf.stanford.edu  Tue Oct 10 10:12:23 2006
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Tue, 10 Oct 2006 10:12:23 -0700
Subject: Shutdown sts SNF 2006-10-10 09:30:46: As per staff, 
Message-ID: <mailman.595.1357938608.25857.sts-pcs@snf.stanford.edu>

Clear 



From jperez at snf.stanford.edu  Thu Oct 19 07:20:15 2006
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Thu, 19 Oct 2006 07:20:15 -0700
Subject: Comment sts SNF 2006-10-07 13:03:32: STS near 4.5,
Message-ID: <mailman.596.1357938608.25857.sts-pcs@snf.stanford.edu>

Clean completed



From kevhuang at snf.stanford.edu  Thu Oct 19 14:48:53 2006
From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu)
Date: Thu, 19 Oct 2006 14:48:53 -0700
Subject: Comment sts SNF 2006-10-19 14:48:53: Cleaning in progress
Message-ID: <mailman.597.1357938608.25857.sts-pcs@snf.stanford.edu>




From jperez at snf.stanford.edu  Fri Oct 20 11:39:13 2006
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Fri, 20 Oct 2006 11:39:13 -0700
Subject: Comment sts SNF 2006-10-19 14:48:53: Cleaning in progress
Message-ID: <mailman.598.1357938608.25857.sts-pcs@snf.stanford.edu>

Completed