Problem sts SNF 2006-09-21 10:10:53: Temporary fix until the new part comes in

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu Sep 21 10:10:54 PDT 2006


System has to be cleaned and tested.before use. If you'd like 
to see this tool up faster and can help clean and test if no one 
is around. One high or low RF oxide test (1000 A). one nitride
test (1000 A). All test should be within 10% of target.




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