Problem sts SNF 2006-09-29 11:36:16: 2% silane 2000 sccm fluctuating from 2000-1766

jperez at snf.stanford.edu jperez at snf.stanford.edu
Fri Sep 29 11:36:17 PDT 2006


If you would like to run a Nitride recipe without errors due to thefluctuation of 2% Silane, you can change Silane gas tolerance 
to 13%. Jim will take a look at the MFC Monday. MY test results were 1014 A avg. 53 A delta, less than 6% across my wafer.
index of refraction 1.97




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